The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
May. 29, 2007
Applicant:
Mehrdad Nikoonahad, Menlo Park, CA (US);
Inventor:
Mehrdad Nikoonahad, Menlo Park, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention discloses an overlay alignment measurement apparatus and method. The overlay target is periodic and is illuminated by coherent radiation; a Fourier transform lens optically computes the Fourier transform of the target. Analysis of the spatial frequencies at the Fourier plane yields overlay alignment information.
Nikoonahad, Mehrdad. (2010). Overlay error measurement using fourier optics (U.S. Patent No. 7656529). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7656529
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