The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
May. 11, 2006
Ken Harada, Wako, JP;
Tetsuya Akashi, Fujimi, JP;
Yoshihiko Togawa, Wako, JP;
Tsuyoshi Matsuda, Wako, JP;
Noboru Moriya, Wako, JP;
Ken Harada, Wako, JP;
Tetsuya Akashi, Fujimi, JP;
Yoshihiko Togawa, Wako, JP;
Tsuyoshi Matsuda, Wako, JP;
Noboru Moriya, Wako, JP;
Riken, Saitama, JP;
Abstract
Charged particle beam equipment having a rotary mechanism in which shift of the observing/machining position incident to the rotary operation of the equipment having the rotary mechanism can be corrected conveniently with high precision in a plane perpendicular to the optical axis of the optical system of charged particle beam or in a slightly inclining plane. An X-Y shift incident to rotation in a plane is determined from the angular information of a rotary mechanism such as a sample holder, diaphragms or biprisms in the charged particle beam equipment, and then driving or controlling is performed to cancel the X-Y shift.