The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Jun. 23, 2006
Soo Young Choi, Fremont, CA (US);
Takako Takehara, Hayward, CA (US);
John M. White, Hayward, CA (US);
Yong Kee Chae, Pleasanton, CA (US);
Soo Young Choi, Fremont, CA (US);
Takako Takehara, Hayward, CA (US);
John M. White, Hayward, CA (US);
Yong Kee Chae, Pleasanton, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods for depositing a microcrystalline silicon film layer with improved deposition rate and film quality are provided in the present invention. Also, photovoltaic (PV) cell having a microcrystalline silicon film is provided. In one embodiment, the method produces a microcrystalline silicon film on a substrate at a deposition rate greater than about 20 nm per minute, wherein the microcrystalline silicon film has a crystallized volume between about 20 percent to about 80 percent.