The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Oct. 06, 2003
Applicants:
Kevin Fairbairn, Saratoga, CA (US);
Jessica Barzilai, Mountain View, CA (US);
Hari K. Ponnekanti, Santa Clara, CA (US);
W. N. (Nick) Taylor, Dublin, CA (US);
Inventors:
Kevin Fairbairn, Saratoga, CA (US);
Jessica Barzilai, Mountain View, CA (US);
Hari K. Ponnekanti, Santa Clara, CA (US);
W. N. (Nick) Taylor, Dublin, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides an apparatus for vacuum processing generally comprising an enclosure having a plurality of isolated chambers formed therein, a gas distribution assembly disposed in each processing chamber, a gas source connected to the plurality of isolated chambers, and a power supply connected to each gas distribution assembly.