The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2010
Filed:
Nov. 15, 2007
Stojan Kanev, Thiendorf OT Sacka, DE;
Hans-jurgen Fleischer, Priestewitz, DE;
Stefan Kreissig, Venusberg, DE;
Karsten Stoll, Sohland an der Spree, DE;
Axel Schmidt, Thiendorf OT Stölpchen, DE;
Andreas Kittlaus, Bad Liebenwerda OT Theisa, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Hans-Jurgen Fleischer, Priestewitz, DE;
Stefan Kreissig, Venusberg, DE;
Karsten Stoll, Sohland an der Spree, DE;
Axel Schmidt, Thiendorf OT Stölpchen, DE;
Andreas Kittlaus, Bad Liebenwerda OT Theisa, DE;
Abstract
A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes comprises a probe card holder, a probe card, and a probe card adapter, The probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed such that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from the holder. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component.