The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2010
Filed:
Jun. 21, 2005
Applicants:
Junichiro Nakayama, Kyoto-fu, JP;
Masanori Seki, Tenri, JP;
Hiroshi Tsunasawa, Kyoto-fu, JP;
Yoshihiro Taniguchi, Nara, JP;
Inventors:
Junichiro Nakayama, Kyoto-fu, JP;
Masanori Seki, Tenri, JP;
Hiroshi Tsunasawa, Kyoto-fu, JP;
Yoshihiro Taniguchi, Nara, JP;
Assignee:
Sharp Kabushiki Kaisha, Osaka-Shi, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
The laser beam projection maskhas three rectangular-shaped slitsas transmission areas. These three slitsare formed in sequence in X direction shown by an arrow X in FIG.C at specified intervals, and the width in the X direction decreases in the order of the slit, the slitand the slit. More particularly, transmission coefficients of the transmission areas change in conformity with a temperature distribution curve Vof a silicon filmshown in FIG.B.