The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2010
Filed:
Aug. 27, 2007
Kazuto Yamauchi, Osaka, JP;
Yasuhisa Sano, Osaka, JP;
Hideyuki Hara, Osaka, JP;
Junji Murata, Osaka, JP;
Keita Yagi, Tokyo, JP;
Kazuto Yamauchi, Osaka, JP;
Yasuhisa Sano, Osaka, JP;
Hideyuki Hara, Osaka, JP;
Junji Murata, Osaka, JP;
Keita Yagi, Tokyo, JP;
Osaka University, Osaka, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A catalyst-aided chemical processing method can process hard-to-process materials, especially SiC, GaN, etc. whose importance as electronic device materials is increasing these days, with high processing efficiency and high precision even for a space wavelength range of not less than several tens of μm. The catalyst-aided chemical processing method comprises: putting a workpiece in a processing liquid in which halogen-containing molecules are dissolved; and moving the workpiece and a catalyst composed of molybdenum or a molybdenum compound relative to each other while keeping the catalyst in contact with or close proximity to a surface to be processed of the workpiece, thereby processing the surface of the workpiece.