The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2010
Filed:
Feb. 28, 2006
Timothy Robert Landsmeer, Amersfoort, NL;
Timothy Robert Landsmeer, Amersfoort, NL;
ASM International N.V., , NL;
Abstract
A pedestal is provided for supporting wafer boats in a process chamber during semiconductor fabrication. The pedestal contains hollow spaces, such as within porous insulating plugs, and gases inside the pedestal may expand during semiconductor processing. The pedestal has an opening for exhausting gases out of its interior and into the process chamber. The opening is provided with a filter, in the form of a sintered ceramic or glass disc sealed within a tube covering the opening, to prevent the passage of particles which may be present inside the pedestal. By filtering the particles, the filter removes a source of contamination, thereby allowing for high quality process results on wafers processed in the process chamber.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile