The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2010
Filed:
Mar. 30, 2007
Mark Winkler, Ridgefield, CT (US);
Thomas Winter, Pleasant Valley, NY (US);
Mark Winkler, Ridgefield, CT (US);
Thomas Winter, Pleasant Valley, NY (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
The present invention includes a method of creating a Site-Dependent (S-D) evaluation library including receiving a plurality of S-D wafers by one or more S-D transfer subsystems in a processing system, establishing wafer state data for each S-D wafer, establishing a library-creation processing sequence for creating a library of S-D evaluation data, determining a first number of S-D process wafers to be processed, establishing first operational states for a plurality of S-D processing elements in one or more processing subsystems, determining a first number of available processing elements, establishing a first S-D transfer sequence, transferring the first number of S-D process wafers to the first number of available processing elements therein and applying a first corrective action.