The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2010
Filed:
Apr. 21, 2006
Applicants:
Yoshihiko Endou, Kawasaki, JP;
Yoshikazu Arisaka, Kawasaki, JP;
Tatsuya Miyazaki, Kawasaki, JP;
Inventors:
Assignee:
Fujitsu Microelectronics Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
An evaluation method of a probe mark of a probe needle of a probe card, includes the steps of: forming the probe mark of the probe needle on a probe mark evaluation wafer; recognizing the probe mark with imaging; and overlapping an imaginary electrode pad with the probe mark recognized by imaging so that the probe mark is evaluated.