The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2010
Filed:
Jan. 15, 2007
Ping Kong Joseph Choy, Hong Kong, HK;
Siu Wing OR, Hong Kong, HK;
Chung Sheung Yung, Hong Kong, HK;
Chou Kee Peter Liu, Kwai Chung, HK;
Lai WA Helen Chan-wong, Hong Kong, HK;
Ping Kong Joseph Choy, Hong Kong, HK;
Siu Wing Or, Hong Kong, HK;
Chung Sheung Yung, Hong Kong, HK;
Chou Kee Peter Liu, Kwai Chung, HK;
Lai Wa Helen Chan-Wong, Hong Kong, HK;
ASM Assembly Automation Ltd., Hong Kong, HK;
Abstract
A damping apparatus is provided for a positioning stage that is operative to move and position an object along a motion axis. The damping apparatus comprises a motion transformation device operative to rotate the positioning stage about a rotary axis that is substantially perpendicular to the motion axis, in response to forces generated to the positioning stage during acceleration or deceleration thereof. Resilient elements connected to the positioning stage serve to reduce transmission of vibration generated from the positioning stage.