The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 19, 2010

Filed:

Jan. 11, 2006
Applicants:

Koji Takei, Nagano, JP;

Sumihiro Ichikawa, Nagano, JP;

Yasunari Suzuki, Nagano, JP;

Ryo Fukasawa, Nagano, JP;

Daisuke Matono, Nagano, JP;

Inventors:

Koji Takei, Nagano, JP;

Sumihiro Ichikawa, Nagano, JP;

Yasunari Suzuki, Nagano, JP;

Ryo Fukasawa, Nagano, JP;

Daisuke Matono, Nagano, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01); H01L 21/20 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method and apparatus for processing a thin film able to easily form grooves in a conductive thin film on an insulating substrate, comprising bringing a first electrode into contact with the conductive thin film, maintaining a conductive state between a tip of a second electrode with a voltage applied with respect to the first electrode and the surface of the conductive thin film, and using the tip of the second electrode to scan the conductive thin film so as to thereby form grooves passing through the thickness of the conductive thin film and exposing the surface of the insulating substrate at their bottoms in the conductive thin film.


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