The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2010
Filed:
Jun. 21, 2006
Kazuyoshi Inoue, Sodegaura, JP;
Nobuo Tanaka, Sodegaura, JP;
Tokie Tanaka, Legal Representative, Sodegaura, JP;
Shigekazu Tomai, Sodegaura, JP;
Masato Matsubara, Sodegaura, JP;
Akira Kaijo, Sodegaura, JP;
Koki Yano, Sodegaura, JP;
Kazuyoshi Inoue, Sodegaura, JP;
Nobuo Tanaka, Sodegaura, JP;
Tokie Tanaka, legal representative, Sodegaura, JP;
Shigekazu Tomai, Sodegaura, JP;
Masato Matsubara, Sodegaura, JP;
Akira Kaijo, Sodegaura, JP;
Koki Yano, Sodegaura, JP;
Idemitsu Kosan Co., Ltd., Tokyo, JP;
Abstract
A sputtering target which is formed of a sintered body including an oxide main components of which are In and Sm. A sputtering target in which a sintered body of an oxide including In and Sm as main components is doped with at least one element with an atomic valency of positive tetravalency or higher in an amount of 20 at. % or less relative to the total sum of all cation elements.