The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2010
Filed:
Jul. 09, 2004
Shinichi Sekiguchi, Tokyo, JP;
Matsutaro Miyamoto, Tokyo, JP;
Shinichi Sekiguchi, Tokyo, JP;
Matsutaro Miyamoto, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping performance, and capable of producing a completely oil-free vacuum. A vacuum pump for exhausting a gas comprises: a main shaftrotatably supported by a bearing; a motorfor driving the main shaftfor rotation; a first exhaust sectionhaving a first rotary vaneattached to the main shaft, a first fixed vanefixed in a first casing, and an intake port; and a second exhaust sectionhaving a second rotary vaneattached to the main shaft, a second fixed vanefixed in a second casing, and an exhaust port. The intake portis located in the vicinity of an end of the main shaft, and the first exhaust section, the bearingand the second exhaust sectionare arranged in this order axially along the main shaft