The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Mar. 30, 2006
Applicants:
David J. Goldman, North Andover, MA (US);
Martin Ryan, Reading, MA (US);
Vladislav Davidkovich, Stoneham, MA (US);
Gordon Hill, Arlington, MA (US);
Inventors:
David J. Goldman, North Andover, MA (US);
Martin Ryan, Reading, MA (US);
Vladislav Davidkovich, Stoneham, MA (US);
Gordon Hill, Arlington, MA (US);
Assignee:
MKS Instruments, Inc., Wilmington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A master valve and at least one slave valve are connected via a network, wherein upon broadcast of a position setpoint of the master valve the at least one slave valve achieves a corresponding position within a shortened period of time, such network being a dedicated network or high speed shared network with position setpoint priority.