The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Dec. 13, 2005
Yuichi Nakatani, Kanagawa, JP;
Yuichi Nakatani, Kanagawa, JP;
Advanced Mask Inspection Technology Inc., Kawasaki-shi, JP;
Abstract
A workpiece inspection apparatus includes a search unit for finding from an input reference image a first pixel group which contains a certain pixel and a second pixel group having grayscale values within a threshold, and a probability acquisition unit responsive to receipt of an optical image of a workpiece being tested and the reference image, for obtaining a probability value based on a grayscale value of the certain pixel, a grayscale value of its corresponding pixel in the second pixel group, a grayscale value of an optical image pixel corresponding to the certain pixel, and a grayscale value of an optical image pixel corresponding to a pixel in the second pixel group corresponding to the certain pixel. The probability value is used to determine whether a defect exists at the optical image pixel corresponding to the certain pixel.