The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
May. 02, 2007
Yvonne Wendela Kruijt-stegeman, Eindhoven, NL;
Raymond Jacobus Wilhelmus Knaapen, Helmond, NL;
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
Yvonne Wendela Kruijt-Stegeman, Eindhoven, NL;
Raymond Jacobus Wilhelmus Knaapen, Helmond, NL;
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An imprint lithography apparatus includes an imprint template operably connected to an imprint actuator. The imprint actuator is actuatable to displace the template along an imprint axis to bring the template into contact with an imprintable medium. The template is connected to the actuator via a bearing configured to permit substantially unrestricted displacement of the actuator relative to the template along an axis substantially perpendicular to the imprint axis during release of the template from the imprintable medium.