The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
May. 24, 2006
Applicants:
Eli Lusky, Tel-Aviv, IL;
Assaf Shappir, Kiryat Ono, IL;
Rustom Irani, Santa Clara, CA (US);
Boaz Eitan, Ra'anana, IL;
Inventors:
Eli Lusky, Tel-Aviv, IL;
Assaf Shappir, Kiryat Ono, IL;
Rustom Irani, Santa Clara, CA (US);
Boaz Eitan, Ra'anana, IL;
Assignee:
Saifun Semiconductors Ltd., Netanya, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for creating a non-volatile memory array includes implanting pocket implants in a substrate at least between mask columns of a given width and at least through an ONO layer covering the substrate, generating increased-width polysilicon columns from the mask columns, generating bit lines in the substrate at least between the increased-width polysilicon columns and depositing oxide at least between the polysilicon columns.