The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2009
Filed:
Jul. 13, 2007
Applicants:
Yuhao Luo, San Jose, CA (US);
Jonathan Cheang-whang Chang, Mountain View, CA (US);
Inventors:
Yuhao Luo, San Jose, CA (US);
Jonathan Cheang-Whang Chang, Mountain View, CA (US);
Assignee:
Xilinx, Inc., San Jose, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of testing a semiconductor wafer having a test structure performs an E-beam stress scan of the test structure in an E-beam system to electrically stress the test structure to produce a stress defect. An inspection scan is performed in the E-beam system to identify the stress defect.