The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2009
Filed:
Jun. 14, 2006
Applicants:
Jin-jun Park, Seoul, KR;
Suk-fill Yun, Suwon-si, KR;
Inventors:
Jin-Jun Park, Seoul, KR;
Suk-Fill Yun, Suwon-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A photo-resist dispensing apparatus is disclosed and comprises; a tank adapted to hold a photo-resist solution, a pump unit adapted to pump the photo-resist solution from the tank, a filter unit adapted to receive the photo-resist solution from the pump unit, and at least one of a first gas discharge unit connected to the tank and adapted to remove gas bubbles from the photo-resist solution held in the tank, and a second gas discharge unit connected to the filter unit and adapted to remove gas bubbles from the photo-resist solution in the filter.