The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2009
Filed:
Dec. 15, 2005
Gaku Ikeda, Yamanashi, JP;
Gaku Ikeda, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In a substrate processing system according to the present invention, module cycle periods at a plurality of process modules PMthrough PMconnected around a transfer module TM having installed therein a vacuum pressure-side transfer robot RB, each representing the sum of a wafer stay time including the wafer processing time and an attendant busy time during which the wafer is transferred before and after the wafer stay time, are all set to a uniform length. The vacuum pressure-side transfer robot RBtakes out a processed wafer Wand carries a next wafer Wto be processed next by executing a pick and place operation for each of the process modules PMthrough PMduring a single access to the process module.