The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2009
Filed:
Mar. 08, 2006
Applicant:
Hisatomi Hosaka, Nirasaki, JP;
Inventor:
Hisatomi Hosaka, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A probe which can be easily formed, is not limited in a mounting position and number, and capable of sufficiently securing a space allowing a contact to move is provided. The probe has a contact to be brought into contact with an inspection object, and a beam part supporting the contact at a tip end portion. A rear portion of the beam part of the probe is joined to a surface at an inspection object side, of a contractor disposed to be opposed to the inspection object. The beam part of the probe is bent so that the above described contact at the tip end portion inclines to the above described inspection object side.