The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2009
Filed:
Aug. 03, 2007
Souichi Toyama, Ebina, JP;
Kounosuke Kitamura, Ebina, JP;
Akira Doi, Hitachinaka, JP;
Hiromu Hirai, Nagoya, JP;
Kenta Seki, Nagoya, JP;
Yoshiaki Kano, Nagoya, JP;
Souichi Toyama, Ebina, JP;
Kounosuke Kitamura, Ebina, JP;
Akira Doi, Hitachinaka, JP;
Hiromu Hirai, Nagoya, JP;
Kenta Seki, Nagoya, JP;
Yoshiaki Kano, Nagoya, JP;
Hitachi Via Mechanics, Ltd., Ebina-shi, JP;
National University Corporation Nagoya Institute of Technology, Nagoya-shi, JP;
Abstract
A rocking actuator and a laser machining apparatus which can suppress a temperature rise of a permanent magnet in a moving-magnet actuator. Even when a steerable mirror is positioned by rapid and continuous motions, highly reliable machining can be performed without degrading machining throughput or hole position accuracy. A cooling jacket for cooling a casing and heat transfer units brought into contact with a coil and the casing are provided. Heat generated in the coil is introduced to the casing through the heat transfer bypass units. Thus, the temperature rise of the coil is suppressed. Radial grooves are provided in the permanent magnet opposed to the coil so as to prevent an eddy current from appearing therein. Groove depth is made not smaller than skin depth expressed by a function of volume resistivity and permeability of the permanent magnet and a fundamental frequency of a current applied to the coil.