The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2009
Filed:
Feb. 03, 2006
Hiroki Yoshikawa, Joetsu, JP;
Yukio Inazuki, Joetsu, JP;
Yoshinori Kinase, Joetsu, JP;
Satoshi Okazaki, Joetsu, JP;
Motohiko Morita, Tokyo, JP;
Tadashi Saga, Tokyo, JP;
Hiroki Yoshikawa, Joetsu, JP;
Yukio Inazuki, Joetsu, JP;
Yoshinori Kinase, Joetsu, JP;
Satoshi Okazaki, Joetsu, JP;
Motohiko Morita, Tokyo, JP;
Tadashi Saga, Tokyo, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Toppan Printing Co., Ltd., Tokyo, JP;
Abstract
A half-tone stacked film is designed so as to have a stacked structure of a first half-tone film and a second half-tone film, and the film thickness d, the refractive index n to exposure light and the extinction coefficient k of these half-tone films are designed so that one of these half-tone films becomes a phase advancement film and the other becomes a phase retardation film. When the film thickness (nm), the refractive index, and the extinction coefficient of the phase advancement film are represented by d, nand k, respectively; and the film thickness (nm), the refractive index, and the extinction coefficient of the phase retardation film are d, n, and k, respectively; the phase advancement film has the relationship of k>a·n+b, and the phase retardation film has the relationship of k<a·n+b.