The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Mar. 12, 2004
Yuichiro Sasaki, Machida, JP;
Bunji Mizuno, Ikoma, JP;
Kichiji Hatanaka, Ibaraki, JP;
Takeshi Katayama, Wako, JP;
Tamaki Watanabe, Wako, JP;
Yuichiro Sasaki, Machida, JP;
Bunji Mizuno, Ikoma, JP;
Kichiji Hatanaka, Ibaraki, JP;
Takeshi Katayama, Wako, JP;
Tamaki Watanabe, Wako, JP;
Panasonic Corporation, Osaka, JP;
Riken, Saitama, JP;
Abstract
The invention provides a nondestructive measuring method and measuring apparatus that assures a high noise immunity and is capable of performing high-accuracy beam current measurements. The inventive beam current measuring apparatus includes a magnetism shielding part for shielding an external magnetic field and a magnetic field sensor arranged in the shielding space generated by said magnetism shielding part, said beam current measuring apparatus measuring, by using said magnetic field sensor, a magnetic field where a beam current to be measured is generated, characterized in that said magnetic field sensor has a magnetic flux/feedback current conversion coefficient of 8×10Wb/A or above.