The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Sep. 23, 2005
Chi Tse Wu, Veradale, WA (US);
Stephane Ferrasse, Veradale, WA (US);
Frank C. Alford, Veradale, WA (US);
Susanne Grabmeier, Munich, DE;
Werner H. Hort, Cranberry, PA (US);
Jaeyeon Kim, Liberty Lake, WA (US);
Susan D. Strothers, Spokane, WA (US);
Andrew Wragg, Cheshire, GB;
Robert Prater, Los Altos, CA (US);
Chi tse Wu, Veradale, WA (US);
Stephane Ferrasse, Veradale, WA (US);
Frank C. Alford, Veradale, WA (US);
Susanne Grabmeier, Munich, DE;
Werner H. Hort, Cranberry, PA (US);
Jaeyeon Kim, Liberty Lake, WA (US);
Susan D. Strothers, Spokane, WA (US);
Andrew Wragg, Cheshire, GB;
Robert Prater, Los Altos, CA (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
The invention includes a target construction having a sputtering region and a flange region laterally outward relative to the sputtering region. The flange region has a front surface disposed on a front face of the construction and a back surface opposing the front surface. An o-ring groove is disposed within the flange region. The o-ring groove has a planar base surface which has a first width and has an orifice disposed along the front surface of the flange. The orifice has a second width as measured parallel relative to the base surface. The second width is greater than the first width. The flange surfaces can additionally be protected from rubbing by a layer of protective material.