The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Sep. 06, 2006
Kiyotaka Wasa, Nara-shi, Nara-ken, JP;
Akira Unno, Kanagawa, JP;
Tetsuro Fukui, Kanagawa, JP;
Takanori Matsuda, Tokyo, JP;
Kiyotaka Wasa, Nara-shi, Nara-ken, JP;
Akira Unno, Kanagawa, JP;
Tetsuro Fukui, Kanagawa, JP;
Takanori Matsuda, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Other;
Abstract
A piezoelectric element structure comprises a supporting substrate, and a piezoelectric film supported on the supporting substrate, in which the piezoelectric film contains a first layer, and a second layer having zirconium, each provided with perovskite structure, and formed to be in contact with each other or laminated through an intermediate layer, and the temperature is set at 500° C. or more at the time of thin film formation so as to provide the piezoelectric film, and a quick cooling is given from the thin film formation temperature at least to 450° C. with a cooling speed of 30° C./min or more for the formation thereof. The piezoelectric film thus formed is in a small thickness as compared with the conventional piezoelectric film, but presents a large piezoelectric constant, hence making it possible to perform efficient microprocessing thereof reliably.