The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Aug. 03, 2006
Henry A. Hill, Tucson, AZ (US);
Frank C. Demarest, Higganum, CT (US);
Alan H. Field, Essex, CT (US);
Henry A. Hill, Tucson, AZ (US);
Frank C. Demarest, Higganum, CT (US);
Alan H. Field, Essex, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
An interference signal S(t) is provided from interference between two beams directed along different paths. The signal S(t) is indicative of changes in an optical path difference n{tilde over (L)}(t) between the different paths, where n is an average refractive index along the different paths, {tilde over (L)}(t) is a total physical path difference between the different paths, and t is time. An error signal is provided to reduce errors in an estimate of {tilde over (L)}(t). The error signal is derived at least in part based on one or more collective properties of a distribution of multi-dimensional values. At least one of the multi-dimensional values in the distribution is generated from a plurality of samples of the signal S(t) (e.g., samples of the signal captured at different times).