The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Aug. 05, 2007
John A. Woollam, Lincoln, NE (US);
Blaine D. Johs, Lincoln, NE (US);
Craig M. Herzinger, Lincoln, NE (US);
Ping He, Lincoln, NE (US);
Martin M. Liphardt, Lincoln, NE (US);
Galen L. Pfeiffer, Lincoln, NE (US);
John A. Woollam, Lincoln, NE (US);
Blaine D. Johs, Lincoln, NE (US);
Craig M. Herzinger, Lincoln, NE (US);
Ping He, Lincoln, NE (US);
Martin M. Liphardt, Lincoln, NE (US);
Galen L. Pfeiffer, Lincoln, NE (US);
James D. Welch, Lincoln, NE (US);
Abstract
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.