The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Jun. 29, 2005
Steven Kasapi, San Francisco, CA (US);
Kenneth Wilsher, Palo Alto, CA (US);
Gary Woods, Sunnyvale, CA (US);
William Lo, San Jose, CA (US);
Radu Ispasoiu, Los Gatos, CA (US);
Nagamani Nataraj, Cupertino, CA (US);
Nina Boiadjieva, Belmont, CA (US);
Steven Kasapi, San Francisco, CA (US);
Kenneth Wilsher, Palo Alto, CA (US);
Gary Woods, Sunnyvale, CA (US);
William Lo, San Jose, CA (US);
Radu Ispasoiu, Los Gatos, CA (US);
Nagamani Nataraj, Cupertino, CA (US);
Nina Boiadjieva, Belmont, CA (US);
DCG Systems, Inc., Fremont, CA (US);
Abstract
An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.