The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Jul. 13, 2004
John D. Larson, Iii, Palo Alto, CA (US);
Qing Bai, Sunnyvale, CA (US);
Farid Matta, Los Altos, CA (US);
Tracy Verhoeven, San Jose, CA (US);
John D. Larson, III, Palo Alto, CA (US);
Qing Bai, Sunnyvale, CA (US);
Farid Matta, Los Altos, CA (US);
Tracy Verhoeven, San Jose, CA (US);
Avago Technologies Wireless IP (Singapore) Pte. Ltd., Singapore, SG;
Abstract
A microfabricated device has a first substrate, a second substrate, a film bulk acoustic resonator (FBAR) device, and a circuit. The second substrate is bonded to the first substrate to define a chamber. The FBAR device is located on a surface of the first substrate and inside the chamber. The circuit is located on a surface of the second substrate and inside the chamber. An electrical connection connects the circuit and the FBAR device.