The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Oct. 08, 2002
Bernard Aspar, Rives, FR;
Christelle Lagahe, Saint Joseph de Riviere, FR;
Bruno Ghyselen, Fontaine, FR;
Bernard Aspar, Rives, FR;
Christelle Lagahe, Saint Joseph de Riviere, FR;
Bruno Ghyselen, Fontaine, FR;
Commissariat a l'Energie Atomique, Paris, FR;
S.O.I. Tec Silicon On Insulator Technologies, Paris, FR;
Abstract
The invention concerns a method for making thin layers containing microcomponents using a substrate. The method includes the following steps: a) provides a substrate; b) local implantation of at least a gaseous species in said substrate perpendicular to a plurality of implantation zones defined on the surface of the substrate, avoiding, by adequate selection of the depth and the shape of said implantation zones, degradation of said surface of the substrate during the step c); c) producing microcomponents in the surface layer of the substrate delimited by the implanting depth; and d) separating the substrate in two parts, one part containing the surface layer including said microcomponents, and the other the rest of the substrate. The invention is useful for producing microcomponents to be integrate on supports different from the those used for their manufacture.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile