The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Dec. 04, 2008
Walter Christian Berner, Chur, CH;
Jarkko Antila, Mariehamn, FI;
Gaétan Duplain, Québec, CA;
Per Björkman, Pålsböle, FI;
Tove Manselin, Aaland, FI;
Oskar Untermarzoner, Ruggell, LI;
Walter Christian Berner, Chur, CH;
Jarkko Antila, Mariehamn, FI;
Gaétan Duplain, Québec, CA;
Per Björkman, Pålsböle, FI;
Tove Manselin, Aaland, FI;
Oskar Untermarzoner, Ruggell, LI;
Inficon GmbH, Bad Ragaz, CH;
Abstract
A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a medium to be measured. A ceramic supporting body is attached to the back side of the housing body by sealing glass and includes a surface area overhanging that surrounds the housing body to form a first sealing surface. A tubular sensor casing incorporates the measuring cell for mounted the ceramic support body, the casing including an inside second surrounding sealing surface corresponding to the first sealing surface. A metal ring seal is between the sealing surfaces and a pressing member presses sealing surfaces together.