The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2009
Filed:
Apr. 08, 2004
Masahiko Fuyumuro, Ashikaga, JP;
Yoshitaka Nakayama, Ashikaga, JP;
Eiichi Kawashima, Ashikaga, JP;
Achilles Corporation, Tokyo, JP;
Abstract
A wafer protective sheetis made of a synthetic resin sheet with a thickness of 80 to 130 μm having a large number of projected parts and recessed parts on its front and rear surfaces. The large number of projected parts and the large number of recessed parts are respectively disposed so that each part is positioned at intersections of lattice stripes, and the projected part and the recessed part are disposed alternately each other. The sheet has such a water-like cross section that the recessed parts in the rear surface match the projected parts on the front surface and the projected parts on the rear surface match the recessed parts in the front surface. The wafer protective sheethas a bending resistance of 30 to 80 mm. The wafer protective sheetof the present invention is sufficiently thin. When the wafer protective sheets are interposed between stacked wafers to protect them, the sheets do not adhere to the wafers. Thus, wafers housed in a container can be protected against vibration during transportation.