The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2009
Filed:
Sep. 19, 2005
Craig L. Brodeur, Marlborough, MA (US);
Marc Laverdiere, Wakefield, MA (US);
Robert F. Mcloughlin, Pelham, NH (US);
J. Karl Niermeyer, Tyngsboro, MA (US);
Jieh-hwa Shyu, Andover, MA (US);
Craig L. Brodeur, Marlborough, MA (US);
Marc Laverdiere, Wakefield, MA (US);
Robert F. McLoughlin, Pelham, NH (US);
J. Karl Niermeyer, Tyngsboro, MA (US);
Jieh-Hwa Shyu, Andover, MA (US);
Entegris, Inc., Chaska, MN (US);
Abstract
One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.