The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2009
Filed:
Jun. 03, 2003
Masaki Taira, Tosu, JP;
Masaki Taira, Tosu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In a substrate processing apparatus that supports substrates W by a plurality of holding members of a rotor to process the substrates W rotated by the rotor, any one of the holding members is provided with press devicesto apply pressures on the peripheries of the substrates W. Each press devicehas an abutting partfor contact with the periphery of the substrate W, a cylinder mechanismfor moving the abutting partbetween a position in contact with the periphery of the substrate W and another position apart from the periphery of the substrate W and a deformable partelastically deformed by the movement of the abutting partto isolate the cylinder mechanismfrom an atmosphere around the substrates W. Consequently, it is possible to provide the substrate processing apparatus and method that do not cause a diaphragm to be deformed excessively.