The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2009
Filed:
Jun. 30, 2006
Applicant:
Daniel Y Abramovitch, Palo Alto, CA (US);
Inventor:
Daniel Y Abramovitch, Palo Alto, CA (US);
Assignee:
Agilent Technologies, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/28 (2006.01); G01N 13/16 (2006.01);
U.S. Cl.
CPC ...
Abstract
In accordance with the invention, an estimator is used in the controller portion of a scanning probe microscope to provide precise position estimates of the probe tip which is controlled in the vertical direction by a microelectromechanical system (MEMS) actuator. The precise position estimates typically enhance the ability of the scanning probe microscope to follow the surface and typically provide improved measurements of the surface topography.