The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2009
Filed:
Nov. 10, 2006
Wolfgang Singer, Aalen, DE;
Johannes Wangler, Koenigsbronn, DE;
Markus Deguenther, Aalen, DE;
Birgit Kuerz, Aalen, DE;
Christoph Menke, Oberkochen, DE;
Wolfgang Singer, Aalen, DE;
Johannes Wangler, Koenigsbronn, DE;
Markus Deguenther, Aalen, DE;
Birgit Kuerz, Aalen, DE;
Christoph Menke, Oberkochen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
The invention relates to an optical device that includes (a) a first optical element with at least one first raster element, where the first raster element has a first axis, (b) a second optical element with at least one second raster element, where the second raster element has a second axis. The first raster element can be changed in its position relative to the second raster element, so that a distance between the first axis and the second axis is variable.