The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2009
Filed:
Aug. 17, 2007
Applicants:
Tomoyuki Horiuchi, Shizuoka, JP;
Takeshi Kurohori, Shizuoka, JP;
Inventors:
Tomoyuki Horiuchi, Shizuoka, JP;
Takeshi Kurohori, Shizuoka, JP;
Assignee:
NuFlare Technology, Inc., Numazu-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/00 (2006.01); G03F 9/00 (2006.01); G06F 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A charged particle beam pattern writing apparatus includes an input part for inputting a predetermined command, a check part for checking a state of a predetermined function used for pattern writing using a charged particle beam, based on the predetermined command, and an output part for outputting the state of the predetermined function which has been checked.