Electron microscope and combined illumination lens

Abstract

An object of the present invention is to provide an electron microscope that employs a hologram of a diffraction pattern to reconstruct a microscopic image involving no imaging aberration due to image forming lenses, as well as a combined illumination lens used for such an electron microscope. The electron microscope according to the present invention has an electron source (), a condenser lens (), a biprism () to split an electron beam supplied from the condenser lens () into coherent first and second electron beams (L, L) that are parallel to each other, a combined illumination lens () to make the first electron beam (L) into a parallel wave and the second electron beam (L) into a converging wave that converges at a predetermined distance, a sample stage () to hold a sample illuminated with the first electron beam (L), a detector () to detect a hologram of a diffraction pattern formed by interference of the first electron beam (L) with the second electron beam (L), a computing unit () to conduct a predetermined Fourier transform on the hologram supplied from the detector () and reconstruct a microscopic image of the sample, and a display () to display the reconstructed microscopic image.