The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2009
Filed:
Dec. 24, 2004
Seiichiro Takahashi, Ageo, JP;
Hiroshi Watanabe, Ageo, JP;
Seiichiro Takahashi, Ageo, JP;
Hiroshi Watanabe, Ageo, JP;
Mitsui Mining & Smelting Co., Ltd., Tokyo, JP;
Abstract
The invention provides an indium oxide-tin oxide powder which can be produced at low cost and which can provide a high-density sputtering target having a prolonged target life, and a sputtering target employing the powder. The indium oxide-tin oxide powder containing an In—Sn oxide as a predominant component is characterized in that the oxide powder contains no compound oxide (InSnO) detectable through X-ray diffraction and has a SnOsolid solution amount in InOof 2.3 mass % or more, the SnOsolid solution amount being calculated from the precipitated SnOcontent (mass %) obtained from the ratio between integral diffraction intensity attributed to InO(222) and integral diffraction intensity attributed to SnO(110).