The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2009
Filed:
Oct. 04, 2006
Josh H. Golden, Santa Cruz, CA (US);
Timothy Weidman, Sunnyvale, CA (US);
Peter Porshnev, San Jose, CA (US);
Kalyan Sista, Sunnyvale, CA (US);
Nikhil Krishnan, New York, NY (US);
Josh H. Golden, Santa Cruz, CA (US);
Timothy Weidman, Sunnyvale, CA (US);
Peter Porshnev, San Jose, CA (US);
Kalyan Sista, Sunnyvale, CA (US);
Nikhil Krishnan, New York, NY (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments herein provide waste abatement apparatuses and methods for treating waste solutions derived from depleted or used plating solutions, such as from an electroless deposition process or an electrochemical plating process. The waste abatement systems and processes may be used to treat the waste solutions by lowering the concentration of, if not completely removing, metal ions or reducing agents that are dissolved within the waste solution. In one embodiment of a demetallization process, a waste solution may be exposed to a heating element (e.g., copper coil) contained within an immersion tank. In another embodiment, the waste solution may be exposed to a catalyst having high surface area (e.g., steel wool or other metallic wool) within an immersion tank. In another embodiment, the waste solution may be flowed through a removable, catalytic conduit (e.g., copper tubing) having an internal catalytic surface.