The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2009
Filed:
Dec. 09, 2004
Frits Jurgen Van Hout, Retie, BE;
Josephus Antonius Maria Van Bommel, Sint Michielsgestel, NL;
Peter Dirksen, Valkenswaard, NL;
Mark Kroon, Utrecht, NL;
Casparus Anthonius Henricus Juffermans, Valkenswaard, NL;
Renatus Maria Adrianus Mathias Van Den Eijnden, Eindhoven, NL;
Frits Jurgen Van Hout, Retie, BE;
Josephus Antonius Maria Van Bommel, Sint Michielsgestel, NL;
Peter Dirksen, Valkenswaard, NL;
Mark Kroon, Utrecht, NL;
Casparus Anthonius Henricus Juffermans, Valkenswaard, NL;
Renatus Maria Adrianus Mathias Van Den Eijnden, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
A sensor arrangement may be used to measure properties, such as optical properties, of a device arranged to process substrates. The sensor arrangement includes a substrate having the following: a plurality of sensor elements provided as an integrated circuit in the substrate, for each one of the plurality of sensor elements associated electronic circuitry comprising a processing circuit connected to the sensor element and an input/output interface connected to the processing circuit, and a power supply unit configured to supply operating power only to the electronic circuitry associated with one or more of the plurality of sensor elements which are in use. The at least one sensor element and possibly the processing electronics, the input/output unit, and/or the power supply unit may be provided as one or more integrated circuits or other structures in the substrate.