The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2009
Filed:
Jan. 25, 2006
Kenichi Sekimoto, Tokyo, JP;
Ken-ichi Tada, Ayase, JP;
Mayumi Takamori, Sagamihara, JP;
Tetsu Yamakawa, Ayase, JP;
Taishi Furukawa, Ayase, JP;
Noriaki Oshima, Yokohama, JP;
Kenichi Sekimoto, Tokyo, JP;
Ken-ichi Tada, Ayase, JP;
Mayumi Takamori, Sagamihara, JP;
Tetsu Yamakawa, Ayase, JP;
Taishi Furukawa, Ayase, JP;
Noriaki Oshima, Yokohama, JP;
Tosoh Corporation, Yamaguchi, JP;
Sagami Chemical Research Center, Kanagawa, JP;
Abstract
A novel tantalum compound, a method for producing the novel tantalum compound, and a method for stably forming a tantalum-containing thin film which contains the desired element. The tantalum compound enables one to selectively form a tantalum-containing thin film free of halogen and the like, and various tantalum-containing thin films which contain the desired element.