The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2009
Filed:
Apr. 15, 2004
Toshiyuki Ogata, Kanagawa, JP;
Kotaro Endo, Kanagawa, JP;
Hiromitsu Tsuji, Kanagawa, JP;
Masaaki Yoshida, Kanagawa, JP;
Mitsuru Sato, Kanagawa, JP;
Syogo Matsumaru, Kanagawa, JP;
Hideo Hada, Kanagawa, JP;
Toshiyuki Ogata, Kanagawa, JP;
Kotaro Endo, Kanagawa, JP;
Hiromitsu Tsuji, Kanagawa, JP;
Masaaki Yoshida, Kanagawa, JP;
Mitsuru Sato, Kanagawa, JP;
Syogo Matsumaru, Kanagawa, JP;
Hideo Hada, Kanagawa, JP;
Tokyo Ohka Kogyo Co., Ltd., Kanagawa, JP;
Abstract
A high-molecular compound and a low-molecular compound or both having an alkali-soluble site (i) wherein at least a part of the alkali-soluble site (i) is protected with (ii) a halogen atom-containing acetal type acid-dissociative, dissolution inhibiting group, as well as a photoresist composition comprising the same. The photoresist composition is highly stable during storage and can give a resist pattern excellent in sectional rectangular shape and having high transparency to an exposure light, particularly a light having a wavelength of 300 nm or less.