The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2009
Filed:
Jan. 09, 2006
Philip L. Campbell, Millbrook, NY (US);
David J. Pinckney, Newtown, CT (US);
Edward Sherwood, Wingdale, NY (US);
Uldis A. Ziemins, Poughkeepsie, NY (US);
Philip L. Campbell, Millbrook, NY (US);
David J. Pinckney, Newtown, CT (US);
Edward Sherwood, Wingdale, NY (US);
Uldis A. Ziemins, Poughkeepsie, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.