The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Jun. 23, 2006
Avishay Guetta, Rehovot, IL;
Doron Korngut, Modiin, IL;
Gil Blai, Ramt-Gan, IL;
Yoni Cohen, Jerusalem, IL;
Avishay Guetta, Rehovot, IL;
Doron Korngut, Modiin, IL;
Gil Blai, Ramt-Gan, IL;
Yoni Cohen, Jerusalem, IL;
Applied Materials, Israel, Ltd., Rehovot, IL;
Abstract
Apparatus for inspecting a surface of a sample, including a detector and folding optics. The folding optics are configured to receive radiation arising from a first region of the surface and from a second region of the surface. The first region and the second region have a first spatial relationship with respect to each other. The folding optics form from the radiation a first image of the first region and a second image of the second region on the detector, wherein the first image is a linear transformation of the first region and the second image is the linear transformation of the second region. The first image and the second image have a second spatial relationship, different from the linear transformation of the first spatial relationship, with respect to each other.