The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Jan. 26, 2006
Seung-bae Park, Seoul, KR;
Jae-sung Park, Gyeonggi-do, KR;
Seung-Bae Park, Seoul, KR;
Jae-Sung Park, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
A method and apparatus for detecting backside particles during wafer processing is provided. The method includes forming layers on a front side of a wafer, holding a backside of the wafer on a top surface of a chuck, cooling the wafer by ejecting gas toward the backside of the wafer and detecting the presence of particles on the backside of the wafer whiles ejecting the gas toward the backside of the wafer. The presence of particles is detected if the pressure of the ejected gas is outside of a predetermined range.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile