The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2009
Filed:
Apr. 18, 2008
Masayuki Nara, Tsukuba, JP;
Masayuki Nara, Tsukuba, JP;
Mitutoyo Corporation, Kawasaki-shi, JP;
Abstract
A tracking type laser interferometer including: a retro-reflectorfor reflecting incident measurement light and returning the same in the incident direction and a main bodyhaving means for emitting measurement light, meansfor receiving return light reflected by the recursive reflector and returned therefrom, and meansfor controlling the emission direction of measurement light so that the distance between both optical axes of measurement light and return light becomes constant at all times, and the tracking type laser interferometer outputs a measurement value in response to an increase or a decrease in distance between the reference point in the main body and the recursive reflector, wherein at least one light reflecting meansis disposed in an optical path between the main bodyand the retro-reflectorand the directions of the optical axes of the measurement light and return light are changed, whereby without moving the tracking type laser interferometer, the measurement range can be expanded, and the measurement accuracy at a specific point can be improved.