The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2009
Filed:
Oct. 26, 2007
Yasuharu Sasaki, Nirasaki, JP;
Taketoshi Okajo, Nirasaki, JP;
Yasuharu Sasaki, Nirasaki, JP;
Taketoshi Okajo, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method for diagnosing temporal deterioration of temperature controlling performance of an electrostatic chuck includes the steps of performing vacuum processing on the substrate wherein the substrate is adsorbed by the electrostatic chuck while a temperature control gas for controlling a temperature of the substrate is supplied between the substrate and the electrostatic chuck, and exposing, during the above step, a substrate absorbed by the electrostatic chuck to an atmosphere generated by using a processing recipe for diagnosis, detecting a temperature of the substrate. A pressure of the temperature control gas is controlled such that the detected temperature becomes a specific temperature, and the controlled pressure is stored in a storage unit. The method further includes a step of diagnosing the deterioration of the temperature controlling performance of the electrostatic chuck based on the pressure of the temperature control gas stored in the storage unit.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile